GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial Nets

Yang, Haoyu ; Li, Shuhe ; Deng, Zihao ; Ma, Yuzhe ; Yu, Bei ; Young, Evangeline F. Y.

IEEE transactions on computer-aided design of integrated circuits and systems, 2020-10, Vol.39 (10), p.2822-2834 [Periódico revisado por pares]

New York: IEEE

Texto completo disponível