Improved SOI FinFETs Performance With Low-Temperature Deuterium Annealing

Ku, Ja-Yun ; Yu, Ji-Man ; Wang, Dong-Hyun ; Jung, Dae-Han ; Han, Joon-Kyu ; Choi, Yang-Kyu ; Park, Jun-Young

IEEE transactions on electron devices, 2023-07, Vol.70 (7), p.3958-3962 [Periódico revisado por pares]

New York: IEEE

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