Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates

Luiz Gonçalves Neto Giuseppe Antonio Cirino; Ronaldo Domingues Mansano 1964-; Patricia Soares Pinto Cardona; Patrick Bernard Verdonck 1958-; Micromachining Technology for Micro-Optics and Nano-Optics (2003 San Jose)

Proceedings of SPIE Bellingham v. 4984, p. 18-28, 2003

Bellingham 2003

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