Increasing the optical coupling efficiency of planar photodetectors electron beam writing of an integrated microlens array on top of a MSM device

Antonio Carlos Seabra 1961- F G Araes; Murilo Araujo Romero; Luiz Gonçalves Neto; B Nabet; Optics in Computing 2000 2000 Quebec City, Canada

Proceedings of SPIE Bellingham: International Society for Optical Engineering- SPIE, 2000 v. 4089, p. 890-894

Bellingham, Wash. International Society for Optical Engineering- SPIE 2000

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