A variable temperature, resonant density sensor made using an improved chip-level vacuum package
Sparks, D. ; Smith, R. ; Schneider, R. ; Cripe, J. ; Massoud-Ansari, S. ; Chimbayo, A. ; Najafi, N.
Sensors and actuators. A. Physical., 2003-10, Vol.107 (2), p.119-124 [Revista revisada por pares]Lausanne: Elsevier B.V
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