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Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006-Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution

Wolstenholme, J.

Surface and interface analysis, 2008-05, Vol.40 (5), p.966-968 [Periódico revisado por pares]

Chichester, UK: John Wiley & Sons, Ltd

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Título:
Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006-Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution
Autor: Wolstenholme, J.
Assuntos: AES ; Analytical chemistry ; Chemistry ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electron and ion emission by liquids and solids; impact phenomena ; Electron spectroscopy (x-ray photoelectron (XPS), Auger electron spectroscopy(AES), etc.) ; Exact sciences and technology ; International Organization for standardisation ; ISO ; lateral resolution ; Metrology ; Metrology, measurements and laboratory procedures ; Photoemission and photoelectron spectra ; Physics ; spatial resolution ; Spectrometric and optical methods ; Units and standards ; XPS
É parte de: Surface and interface analysis, 2008-05, Vol.40 (5), p.966-968
Notas: istex:58446739EA7E04941AA22E6BD41F75362A688A4C
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Descrição: This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X‐ray photoelectron spectrometers under defined settings. The straight‐edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 µm. The grid method is suitable if the lateral resolution is expected to be less than 1 µm but more than 20 nm. The gold‐island method is suitable for instruments where the lateral resolution is expected to be less than 50 nm. The standard contains three informative annexes that provide illustrative examples of measurements of lateral resolution. Copyright © 2008 John Wiley & Sons, Ltd.
Editor: Chichester, UK: John Wiley & Sons, Ltd
Idioma: Inglês

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