Prediction of etching-shape anomaly due to distortion of ion sheath around a large-scale three-dimensional structure by means of on-wafer monitoring technique and computer simulation
Kubota, Tomohiro ; Ohtake, Hiroto ; Araki, Ryosuke ; Yanagisawa, Yuuki ; Iwasaki, Takuya ; Ono, Kohei ; Miwa, Kazuhiro ; Samukawa, Seiji
Journal of physics. D, Applied physics, 2013-10, Vol.46 (41), p.415203-1-7 [Periódico revisado por pares]Bristol: IOP Publishing
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