MOSFETs on (110) C-H Diamond: ALD Al₂O₃/Diamond Interface Analysis and High Performance Normally-OFF Operation Realization

Liu, Benjian ; Bi, Te ; Fu, Yu ; Kudara, Ken ; Imanishi, Shoichiro ; Liu, Kang ; Dai, Bing ; Zhu, Jiaqi ; Kawarada, Hiroshi

IEEE transactions on electron devices, 2022-03, Vol.69 (3), p.949-955 [Periódico revisado por pares]

New York: IEEE

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