Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere

Signore, M. A. ; Serra, A. ; Manno, D. ; Quarta, G. ; Calcagnile, L. ; Maruccio, L. ; Sciurti, E. ; Melissano, E. ; Campa, A. ; Martucci, M. C. ; Francioso, L. ; Velardi, L.

Journal of applied physics, 2024-03, Vol.135 (12) [Periódico revisado por pares]

Melville: American Institute of Physics

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