Effect of peak target power on the properties of Cr thin films sputtered by HiPIMS in deep oscillation magnetron sputtering (DOMS) mode

Ferreira, F. ; Serra, R. ; Oliveira, J.C. ; Cavaleiro, A.

Surface & coatings technology, 2014-11, Vol.258, p.249-256 [Periódico revisado por pares]

Amsterdam: Elsevier B.V

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