MICRODISCHARGE OPTICAL EMISSION SPECTROSCOPY AS A NOVEL DIAGNOSTIC TOOL FOR METALORGANIC CHEMICAL VAPOR DEPOSITION OF (Ba,Sr)TiO3 FILMS
Momose, S ; Nakamura, T ; Tachibana, K
Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 2A, pp. 555-559. 2000, 2000, Vol.39 (2A), p.555-559 [Periódico revisado por pares]Texto completo disponível