Fabrication and tests of a MEMS-based double-beam cantilever flow sensor with clarifying of temperature effect
Pang, Junguo ; Segawa, Takehiko ; Ikehara, Tsuyoshi ; Yoshida, Hiro ; Kikushima, Yoshihiro ; Abe, Hiroyuki ; Meada, Ryutaro
SPIE proceedings series, 2005, Vol.5649, p.253-264Bellingham WA: SPIE
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