Planar process for 16 Mb memory devices using thermal reflow-type polyimide
UMEZAKI, H ; KOYAMA, N ; SUZUKI, R ; MATSUYAMA, H ; SHOOJI, F
Journal of the Electrochemical Society, 1989, Vol.136 (8), p.2357-2360 [Periódico revisado por pares]Pennington, NJ: Electrochemical Society
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