Effect of xenon bombardment on ruthenium-coated grazing incidence collector mirror lifetime for extreme ultraviolet lithography

Nieto, Martin ; Allain, Jean-Paul ; Titov, Vladimir ; Hendricks, Matthew R. ; Hassanein, Ahmed ; Rokusek, Daniel ; Chrobak, Christopher ; Tarrio, Charles ; Barad, Yaniv ; Grantham, Steven ; Lucatorto, Thomas B. ; Rice, Brian

Journal of applied physics, 2006-09, Vol.100 (5), p.053510-053510-9 [Periódico revisado por pares]

United States: American Institute of Physics

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