Interlayer dielectric process for LSI circuits using positive photosensitive polyimide synthesized by block-copolymerization
Aoyagi, Masahiro ; Segawa, Shigemasa ; Jung, EunSil ; Itatani, Taro ; Komuro, Masanori ; Sakamoto, Tsuenenori ; Itatani, Hiroshi ; Miyamura, Masataka ; Matsumoto, Shunichi
SPIE proceedings series, 2001, Vol.4345, p.1073-1078Bellingham WA: SPIE
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