X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Matsuoka, M. ; Isotani, S. ; Sucasaire, W. ; Kuratani, N. ; Ogata, K.

Surface & coatings technology, 2008-03, Vol.202 (13), p.3129-3135 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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