Deposition and growth limits for microelectronics
Aip Conference Proceedings, V.167 G W Rubloff; Topical Conference on Deposition and Growth : Limits for Microelectronics (1987 : Anaheim)
New York Aip 1987
Localização: IF - Instituto de Física (MS AIP v.167 ex.1 )(Acessar)
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