2D Design Rule and Layout Analysis using Novel Large-area First-principles-based Simulation Flow Incorporating Lithographic and Stress Effects

PRINS, Steven L ; BLATCHFORD, James ; OLUBUYIDE, Oluwamuyiwa ; RILEY, Deborah ; CHANG, Simon ; HONG, Qi-Zhong ; KIM, T. S ; BORGES, Ricardo ; LI LIN

Proceedings of SPIE, the International Society for Optical Engineering, 2009, Vol.7275

Bellingham, Wash: SPIE

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