A unique ECR broad beam source for thin film processing
Zeuner, Michael ; Scholze, Frank ; Neumann, Horst ; Chassé, Thomas ; Otto, Gunther ; Roth, Dietmar ; Hellmich, Anke ; Ocker, Berthold
Surface & coatings technology, 2001-07, Vol.142, p.11-20 [Periódico revisado por pares]Elsevier B.V
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