Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2
Kano, Fuyuki ; Uchida, Hiroshi ; Koda, Seiichiro
The Journal of supercritical fluids, 2009-10, Vol.50 (3), p.313-319 [Periódico revisado por pares]Texto completo disponível