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Yttrium oxide thin films: Influence of the oxygen vacancy network organization on the microstructure

Jublot, M. ; Paumier, F. ; Pailloux, F. ; Lacroix, B. ; Leau, E. ; Guérin, P. ; Marteau, M. ; Jaouen, M. ; Gaboriaud, R.J. ; Imhoff, D.

Thin solid films, 2007-06, Vol.515 (16), p.6385-6390 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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Título:
Yttrium oxide thin films: Influence of the oxygen vacancy network organization on the microstructure
Autor: Jublot, M. ; Paumier, F. ; Pailloux, F. ; Lacroix, B. ; Leau, E. ; Guérin, P. ; Marteau, M. ; Jaouen, M. ; Gaboriaud, R.J. ; Imhoff, D.
Assuntos: Composition and phase identification ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Crystallographic phases ; Defects and impurities in crystals; microstructure ; Doping and impurity implantation in other materials ; Exact sciences and technology ; Ion and electron beam-assisted deposition; ion plating ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Oxygen vacancy network ; Physics ; Rare Earth Oxyde ; Structure and morphology; thickness ; Structure of solids and liquids; crystallography ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film ; Thin film structure and morphology
É parte de: Thin solid films, 2007-06, Vol.515 (16), p.6385-6390
Descrição: Y 2O 3 thin films are deposited by ion beam sputtering on Si, SrTiO 3 and MgO substrates. In order to obtain a better knowledge on the phase transition mechanisms in yttrium oxide, the effects of ion implantation have been studied as a function of the initial microstructure of thin films. The different microstructures for the as-deposited and implanted samples have been studied and characterized by means of X ray diffraction, High Resolution Transmission Electron Microscopy and Electron Energy Loss Spectroscopy and are compared to the cubic-C and monoclinic-B phase of Y 2O 3. The experimental results show clearly the presence of non-equilibrium phases in the implanted and non-implanted thin films. A particular attention is paid to the understanding of the relationship between the oxygen vacancy network organization, the stoichiometry and the formation mechanisms of these crystallographic phases.
Editor: Lausanne: Elsevier B.V
Idioma: Inglês

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Yttrium oxide thin films: Influence of the oxygen vacancy network organization on the microstructure

Jublot, M. ; Paumier, F. ; Pailloux, F. ; Lacroix, B. ; Leau, E. ; Guérin, P. ; Marteau, M. ; Jaouen, M. ; Gaboriaud, R.J. ; Imhoff, D.

Lausanne: Elsevier B.V

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