Review of micromachined optical accelerometers: from mg to sub-μg
Lu, Qianbo ; Wang, Yinan ; Wang, Xiaoxu ; Yao, Yuan ; Wang, Xuewen ; Huang, Wei
Opto-Electronic Advances, 2021-01, Vol.4 (3), p.200045-200045 [Periódico revisado por pares]Chengdu: Editorial Office of Opto-Electronic Advances
Texto completo disponível