Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications

Yu, Xingshi ; Chen, Xia ; Milosevic, Milan M ; Shen, Weihong ; Topley, Rob ; Chen, Bigeng ; Yan, Xingzhao ; Cao, Wei ; Thomson, David J ; Saito, Shinichi ; Peacock, Anna C ; Muskens, Otto L ; Reed, Graham T

Micromachines (Basel), 2022-02, Vol.13 (2), p.291 [Periódico revisado por pares]

Switzerland: MDPI AG

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