Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers

de Castilho, Bruno César Noronha Marques ; de Sousa Mazuco, Felipe ; Rodrigues, Alisson Mendes ; Avila, Pedro Renato Tavares ; Apolinario, Raira Chefer ; Daum, Philipp ; da Costa, Fabiana Pereira ; Menezes, Romualdo Rodrigues ; de Araújo Neves, Gelmires ; Greiner, Christian ; Pinto, Haroldo Cavalcanti

Nanomaterials (Basel, Switzerland), 2022-07, Vol.12 (14), p.2465 [Revista revisada por pares]

Basel: MDPI AG

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