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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Algamili, Abdullah Saleh ; Khir, Mohd Haris Md ; Dennis, John Ojur ; Ahmed, Abdelaziz Yousif ; Alabsi, Sami Sultan ; Ba Hashwan, Saeed Salem ; Junaid, Mohammed M.

Nanoscale research letters, 2021-01, Vol.16 (1), p.16-16, Article 16 [Periódico revisado por pares]

New York: Springer US

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Título:
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Autor: Algamili, Abdullah Saleh ; Khir, Mohd Haris Md ; Dennis, John Ojur ; Ahmed, Abdelaziz Yousif ; Alabsi, Sami Sultan ; Ba Hashwan, Saeed Salem ; Junaid, Mohammed M.
Assuntos: Actuation ; Actuators ; Capacitive ; Chemistry and Materials Science ; Electromagnetic ; Electrostatic ; Electrothermal ; Fabrication ; Materials Science ; Microelectromechanical systems ; Miniaturization ; Molecular Medicine ; Nano Review ; Nanochemistry ; Nanoscale Science and Technology ; Nanotechnology ; Nanotechnology and Microengineering ; Power consumption ; Sensors
É parte de: Nanoscale research letters, 2021-01, Vol.16 (1), p.16-16, Article 16
Notas: ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-3
content type line 23
ObjectType-Review-1
Descrição: Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
Editor: New York: Springer US
Idioma: Inglês

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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Algamili, Abdullah Saleh ; Khir, Mohd Haris Md ; Dennis, John Ojur ; Ahmed, Abdelaziz Yousif ; Alabsi, Sami Sultan ; Ba Hashwan, Saeed Salem ; Junaid, Mohammed M.

New York: Springer US

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