Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor
Likhite, Rugved ; Banerjee, Aishwaryadev ; Majumder, Apratim ; Karkhanis, Mohit ; Kim, Hanseup ; Mastrangelo, Carlos H.
Sensors (Basel, Switzerland), 2019-09, Vol.19 (18), p.3954 [Periódico revisado por pares]Basel: MDPI AG
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