Area Dependence of Effective Electromechanical Coupling Coefficient Induced by On-Chip Inductance in LiNbO[sub.3]-Based BAW Resonators
Lv, Lu ; Shuai, Yao ; Huang, Shitian ; Zhu, Dailei ; Wang, Yuedong ; Luo, Wenbo ; Pan, Xinqiang ; Wu, Chuangui ; Zhang, Wanli
Electronics (Basel), 2022-12, Vol.11 (23) [Periódico revisado por pares]MDPI AG
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