Spectroscopic ellipsometry characterization of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix
Keita, A-S ; Naciri, A En ; Delachat, F ; Carrada, M ; Ferblantier, G ; Slaoui, A
IOP conference series. Materials Science and Engineering, 2009-01, Vol.6 (1), p.012016-012016 [Peer Reviewed Journal]Bristol: IOP Publishing
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