Spectroscopic ellipsometry characterization of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix

Keita, A-S ; Naciri, A En ; Delachat, F ; Carrada, M ; Ferblantier, G ; Slaoui, A

IOP conference series. Materials Science and Engineering, 2009-01, Vol.6 (1), p.012016-012016 [Periódico revisado por pares]

Bristol: IOP Publishing

Texto completo disponível