Micromachined array-type Mirau interferometer for parallel inspection of MEMS
Albero, J ; Bargiel, S ; Passilly, N ; Dannberg, P ; Stumpf, M ; Zeitner, U D ; Rousselot, C ; Gastinger, K ; Gorecki, C
Journal of micromechanics and microengineering, 2011-06, Vol.21 (6), p.065005 [Periódico revisado por pares]Bristol: IOP Publishing
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