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An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Lullin, Justine ; Bargiel, Sylwester ; Lemoal, Patrice ; Perrin, Stéphane ; Albero, Jorge ; Passilly, Nicolas ; Froehly, Luc ; Lardet-Vieudrin, Franck ; Gorecki, Christophe

Journal of micromechanics and microengineering, 2015-11, Vol.25 (11), p.115013-12 [Periódico revisado por pares]

IOP Publishing

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Título:
An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
Autor: Lullin, Justine ; Bargiel, Sylwester ; Lemoal, Patrice ; Perrin, Stéphane ; Albero, Jorge ; Passilly, Nicolas ; Froehly, Luc ; Lardet-Vieudrin, Franck ; Gorecki, Christophe
Assuntos: Acoustics ; Actuation ; Arrays ; Biological ; comb drive microactuator and microsensor ; Diagnosis ; Diseases ; Displacement ; Electrostatics ; Engineering Sciences ; Materials ; Mechanics ; Micro and nanotechnologies ; Microelectronics ; microinterferometer ; Micromechanics ; MOEMS ; Optics ; Physics ; vertical electrostatic microscanner
É parte de: Journal of micromechanics and microengineering, 2015-11, Vol.25 (11), p.115013-12
Notas: JMM-101588.R1
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
Descrição: We present a micromachined vertical scanner with a array of suspended 'spider-type' micromirrors which is a key component of a multi-channel 'active' Mirau microinterferometer. The microscanner provides for the vertical displacement of the reference micromirrors for the implementation of the phase shifting technique. Vertical comb-drive structures are employed for actuation of the micromirrors (displacement range of hundreds of nm at 500 Hz) as well as for in situ capacitive displacement sensing. Integration of micro-opto-electro-mechanical microscanners in a handheld interference microscope has the advantage of significantly decreasing instrument size because of the small footprint of the microscanner. Particularly interesting applications of the microscanner are low-cost and portable microsystems for the parallel inspection of biological tissues, e.g. for early diagnosis of specific diseases such as skin cancers.
Editor: IOP Publishing
Idioma: Inglês

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An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Lullin, Justine ; Bargiel, Sylwester ; Lemoal, Patrice ; Perrin, Stéphane ; Albero, Jorge ; Passilly, Nicolas ; Froehly, Luc ; Lardet-Vieudrin, Franck ; Gorecki, Christophe

IOP Publishing

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