Interface morphology in strained layer epitaxy of Si/Si1-xGex layers studied by x-ray scattering under grazing incidence and atomic force microscopy
KOVATS, Z ; SALDITT, T ; METZGER, T. H ; PEISL, J ; STIMPEL, T ; LORENZ, H ; CHU, J. O ; ISMALL, K
Journal of physics. D, Applied physics, 1999-02, Vol.32 (4), p.359-368 [Periódico revisado por pares]Bristol: Institute of Physics
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