Positive Ion Chemistry of SiH4/NF3 Gaseous Mixtures Studied by Ion Trap Mass Spectrometry

Antoniotti, Paola ; Operti, Lorenza ; Rabezzana, Roberto ; Turco, Francesca ; Borocci, Stefano ; Grandinetti, Felice

European journal of mass spectrometry (Chichester, England), 2009-01, Vol.15 (2), p.209-220 [Periódico revisado por pares]

London, England: SAGE Publications

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