Deposition of TiC Film by Microwave Sheath-Voltage Combination Plasma
Ushiro, Yusuke ; Tanaka, Ippei ; Harada, Yasunori ; Ogisu, Takashi
Journal of the Japan Institute of Metals and Materials, 2024/01/01, Vol.88(1), pp.11-15 [Periódico revisado por pares]Sendai: The Japan Institute of Metals and Materials
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