CMUT cavity pressure measurement using an atomic force microscope
Mohammed, Thasnim ; Muscedere, Roberto ; Chowdhury, Sazzadur
Microsystem technologies : sensors, actuators, systems integration, 2024-03, Vol.30 (3), p.343-352 [Periódico revisado por pares]Berlin/Heidelberg: Springer Berlin Heidelberg
Texto completo disponível