Influence of substrate temperature on the growth and properties of reactively sputtered In-rich InAlN films

Afzal, Naveed ; Devarajan, Mutharasu ; Ibrahim, Kamarulazizi

Journal of materials science. Materials in electronics, 2016-05, Vol.27 (5), p.4281-4289 [Periódico revisado por pares]

New York: Springer US

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