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Room-temperature preparation of metal-oxide nanostructures by DUV lithography from metal-oxo clusters

Stehlin, Fabrice ; Wieder, Fernand ; Spangenberg, Arnaud ; Le Meins, Jean-Marc ; Soppera, Olivier

Journal of materials chemistry. C, Materials for optical and electronic devices, 2014-01, Vol.2 (2), p.277-285 [Peer Reviewed Journal]

Royal Society of Chemistry

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