Bipolar structure of carrier concentration in hydrogen pre-annealing Czochralski silicon wafer
Yu, Xuegong ; Yang, Deren ; Fan, Ruixin ; Ma, Xiangyang ; Que, Duanlin
Physica. B, Condensed matter, 2003-12, Vol.340-342, p.601-604
[Revista revisada por pares]
Elsevier B.V
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