The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

MOON, Yeon-Keon ; KIM, Se-Hyun ; PARK, Jong-Wan

Journal of materials science. Materials in electronics, 2006-12, Vol.17 (12), p.973-977 [Periódico revisado por pares]

Norwell, MA: Springer

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