INFLUENCE OF TEMPERATURE ON THE DEPOSITION RATE OF POLYCRYSTALLINE SILICON OBTAINED BY VERTICAL LPCVD
Teixeira, R C ; Doi, I ; Diniz, J A ; Zakia, M B P ; Swart, J W
Revista Brasileira de Aplicacoes de Vacuo (Brazilian Journal of Vacuum Applications), 2004-01, Vol.23 (2), p.49-51Texto completo disponível