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Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method

Segawa, Hiroyo ; Sakurai, Hideaki ; Izumi, Reiko ; Hayashi, Toshiharu ; Yano, Tetsuji ; Shibata, Shuichi

Journal of materials science, 2011-05, Vol.46 (10), p.3537-3543 [Revista revisada por pares]

Boston: Springer US

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Título:
Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method
Autor: Segawa, Hiroyo ; Sakurai, Hideaki ; Izumi, Reiko ; Hayashi, Toshiharu ; Yano, Tetsuji ; Shibata, Shuichi
Materias: Analysis ; Characterization and Evaluation of Materials ; Chemistry and Materials Science ; Classical Mechanics ; Copper ; Cracks ; Crystallinity ; Crystallization ; Crystallography and Scattering Methods ; Deposition ; Ethanolamines ; Flat surfaces ; Glass substrates ; Hexamethylenetetramine ; High tech industries ; Low temperature ; Materials Science ; Methods ; Methyl cellosolve ; Monoethanolamine (MEA) ; Morphology ; Nitrides ; Organic chemistry ; Polymer Sciences ; Seeds ; Silicon substrates ; Sol-gel processes ; Solid Mechanics ; Transmittance ; Zinc acetate ; Zinc nitride ; Zinc oxide ; Zinc oxides
Es parte de: Journal of materials science, 2011-05, Vol.46 (10), p.3537-3543
Notas: ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
Descripción: Transparent zinc oxide (ZnO) films were coated on seed layers prepared by the sol–gel method by chemical solution deposition method. Firstly, seed layers were prepared from zinc acetate and monoethanolamine, 2-methoxyethanol by the sol–gel method on a silicon substrate or a slide glass. Next, the substrate coated with a seed layer was immersed in zinc nitride solution with hexamethylenetetramine, and ZnO films were obtained. The transmittance of the ZnO films depended on the morphology and crystallinity of the seed layers. When the seed layer were dried on a hot plate, the seed layer had flat surface and transparent ZnO film could be obtained on the seed layers dried at temperatures above 200 °C. When the seed layer was prepared from zinc acetate dihydrate dried in a petri dish, the seed layer were smooth without cracks and the transparent ZnO films were obtained at temperature below 100 °C.
Editor: Boston: Springer US
Idioma: Inglés

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Low-temperature crystallization of oriented ZnO film using seed layers prepared by sol–gel method

Segawa, Hiroyo ; Sakurai, Hideaki ; Izumi, Reiko ; Hayashi, Toshiharu ; Yano, Tetsuji ; Shibata, Shuichi

Boston: Springer US

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