Preparation and relevant properties of amorphous AlBN dielectric films

Liu, Feng-feng ; Li, Yu-xiong ; Sui, Zhan-peng ; Cai, Yong ; Zhang, Yong-hong ; Jiang, Chun-ping

Cai liao gong cheng = Journal of materials engineering, 2020-06, Vol.48 (6), p.112-117 [Periódico revisado por pares]

Beijing: Beijing Institute of Aeronautical Materials

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