A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Algamili, Abdullah Saleh ; Khir, Mohd Haris Md ; Dennis, John Ojur ; Ahmed, Abdelaziz Yousif ; Alabsi, Sami Sultan ; Ba Hashwan, Saeed Salem ; Junaid, Mohammed M.
Nanoscale research letters, 2021-01, Vol.16 (1), p.16-16, Article 16 [Periódico revisado por pares]New York: Springer US
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