0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

Li, Qingsong ; Xiao, Dingbang ; Zhou, Xin ; Xu, Yi ; Zhuo, Ming ; Hou, Zhanqiang ; He, Kaixuan ; Zhang, Yongmeng ; Wu, Xuezhong

Microsystems & nanoengineering, 2018-11, Vol.4 (1), p.32-11, Article 32 [Periódico revisado por pares]

England: Springer Nature B.V

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