Influence of rapid thermal annealing on the specific features of defect generation in silicon wafers during the formation of effective internal getters

Mezhennyi, M. V. ; Milvidskii, M. G. ; Resnick, V. J.

Surface investigation, x-ray, synchrotron and neutron techniques, 2009-08, Vol.3 (4), p.612-619 [Periódico revisado por pares]

Dordrecht: SP MAIK Nauka/Interperiodica

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