In-line optical surface roughness determination by laser scanning
Toker, Gregory ; Brunfeld, Andrei ; Shamir, Joseph ; Spektor, Boris ; Cromwell, Evan F ; Adam, Johann F
Proceedings of SPIE, the International Society for Optical EngineeringProceedings of SPIE, the International Society for Optical Engineering, 2002, Vol.4777, p.323-329SPIE
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