Aspects of metal etching for interconnect technologies
Patrick Bernard Verdonck 1958- H Meynen; Brazilian Microelectronics School (3rd 1994 Campinas)
Advanced Metallization for Vlsi/ulsi Applications: Proceedings Campinas : Sbmicro/Unicamp, 1994Campinas Sbmicro/Unicamp 1994
Item não circula. Consulte sua biblioteca.(Acessar)