Microcrystalline silicon with high electron field-effect mobility deposited at '230 GRAUS'
M. Mulato Y Chen; S Wagner; Antonio Ricardo Zanatta; International Conference on Amorphous and Microcrystalline Semiconductors - Science and Technology (18. 1999 Snowbird)
Journal of Non-Crystalline Solids Amsterdam v. 266-269, p. 1260-1264, 2000