Implementation of an optical integrated pressure sensor and experimental results

Acácio Luiz Siarkowski Douglas Anderson Pereira Bulla; Nilton Itiro Morimoto 1962-; International Symposium on Microelectronics Technology and Devices SBMICRO (17 2002 Porto alegre)

Morimoto, N.I.; Ribas, P.R.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002

Pennington The Electrochemical Society 2002

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