Highly conductive n-type MC-Si:H films deposited at very low temperature

Alexandre Mantovani Nardes Ely Antonio Tadeu Dirani; Adnei Melges de Andrade 1943-; Fernando Josepetti Fonseca 1959-; International Symposium on Microelectronics Technology and Devices SBMICRO 2002 (17th 2002 Porto Alegre, RS)

Morimoto, N.I.; Ribas, R.P.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002

Pennington The Electrochemical Society 2002

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